CyberOptics’ In-line Particle Sensor (IPS) saves time, saves expense and improves yields in semiconductor fabs


CYberOptics unveiled a new In-Line Particle Sensor (IPS) with CyberSpectrum™ software for semiconductor tool set-up and equipment diagnostics.

new In-Line Particle Sensor (IPS) with CyberSpectrum software

An extension of the industry-leading WaferSense® and ReticleSense® Airborne Particle Sensor (APS) technology documented by fabs as the Best Known Method (BKM), the new In-Line Particle Sensor (IPS) with CyberSpectrum software detects particles in gas and vacuum lines 24/7 in semiconductor process equipment. The IPS quickly identifies, monitors and enables troubleshooting of particles down to 0.1µm.

The IPS can be installed in any gas or vacuum system, and is particularly relevant for EUVL tools where the ability to monitor particles in-line can significantly improve EUVL tool yield and productivity. For example, it can be installed at the vacuum line in between the EUV process chamber and the vacuum pump, saving significant time compared to current methods of sending a monitor dummy reticle into the system to check for particles before and after sending the reticle into the EUVL. The IPS is always on and collecting particle data, which is especially critical during chamber purging.

“We have incorporated our proprietary airborne particle sensing technology into an in-line form factor,” said Dr. Subodh Kulkarni, President and CEO, CyberOptics, “The IPS delivers the same benefits fabs worldwide have recognized with this proven technology. It can significantly save time and expense while improving yields and productivity.”

Process and equipment engineers in semiconductor fabs can speed equipment qualification with real-time, 24-7 monitoring, compare past and present data, as well as one tool to another. Contamination sources can be identified quickly and the effects of cleaning, adjustments and repairs can be seen in real-time. Fabs can shorten equipment maintenance cycles, lower equipment expenses and optimize preventative maintenance plans.

CyberOptics will also demonstrate the ReticleSense Airborne Particle Sensor (APSRQ) and the ReticleSense Auto Multi Sensor (AMSR) for wireless leveling, vibration, and relative humidity (RH) measurements.

 


AS-Interface

[아이씨엔매거진]

아이씨엔 매거진은 산업용사물인터넷(IIoT) 및 디지털화(Digitalization), 디지털전환(Digital Transformation) 애널리틱스를 제공하는 IT 네트워크 기반의 산업 기술 매거진입니다.

산업용사물인터넷(IIoT)와 가상물리시스템(CPS)을 통해 디지털화를 추구함으로써 제조 산업 및 플랜트를 제조활동 전반에 걸친 스마트제조를 구현하고자 합니다.

아이씨엔 매거진은 이러한 디지털화를 구축함으로써 새로운 비즈니스 전략을 도출하는 디지털전환을 위한 관련 리서치 및 애널리틱스를 제공합니다.

https://icnweb.kr


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